发明名称 Solid-state image sensing device and method for manufacturing the same
摘要 In the solid-state image sensing device, a first N type semiconductor region and an N well of a PMOS region are formed in the same process, thereby making the first N type semiconductor region and the N well in the PMOS region substantially equal in N type impurity concentration-depth profile. By forming the first N type semiconductor region and the N well in the same process, the number of manufacturing process for the solid-state image sensing device can be decreased. It is, therefore, possible to suppress excessive application of heat history to the solid-state image sensing device during ion implantation and diffusion of N type impurity. Accordingly, by suppressing excessive diffusion of impurity and the like resulting from the excessive application of the heat history to the solid-state image sensing device, yield of the solid-state image sensing device can be improved.
申请公布号 US2006022230(A1) 申请公布日期 2006.02.02
申请号 US20050155643 申请日期 2005.06.20
申请人 NEC ELECTRONICS CORPORATION 发明人 YAMAMOTO JUNICHI;NAKASHIBA YASUTAKA
分类号 H01L21/00;H01L31/062 主分类号 H01L21/00
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