A DYNAMIC FLUID CONTROL SYSTEM FOR IMMERSION LITHOGRAPHY

摘要

A dynamic fluid control system and method capable of reducing dynamic forces from the fluid on the last optical element and substrate stage caused by the motion of the immersion fluid. The system includes an imaging element that defines an image and a stage configured to support a substrate. An optical system is provided to project the image defined by the imaging element onto the substrate. The optical system includes a last optical element. A gap filled with immersion fluid is provided is between the substrate and the last optical element. A dynamic force control system is provided to maintain a substantially constant force on the last optical element and stage by compensating for dynamic changes of the immersion fluid caused by the motion of the immersion fluid through the gap and/or movement of the stage.