| 摘要 |
<p>A flow detector comprises a body 1 having a fluid channel 2 penetrating its interior and having a detection section 11 of a flow sensor 10 disposed in the fluid channel. An input and an output block 3 and 5 have respectively an input and an output channel 4 and 6 in communication with the fluid channel 2 in the detector body 1. A flow control valve 21 is provided in the output block 5. The detector body 1 and each of the input and output blocks 3 and 5 are joined together via seal members 16a and 16c that seal the channels 2, 4 and 6 provided in the body and blocks and are fixedly connected at positions separate from said channels using screws. The flow detector can be used in a clean environment (e.g. a semiconductor fabrication apparatus) and is an integrated apparatus that enables the flow to be measured and regulated. <IMAGE></p> |
