发明名称 |
Pattern form object and a manufacturing method thereof |
摘要 |
A pattern form object and its manufacturing method are disclosed. The pattern form object includes a pattern constituted by an aggregate of grains, a supporting member for supporting the pattern, and a mixed layer formed at a boundary of the pattern and the supporting member. The mixed layer is constituted by a mixture of the grains and the supporting member. Dimensions of the grains in a region other than the mixed layer are greater than dimensions of the grains in the mixed layer.
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申请公布号 |
US2005252398(A1) |
申请公布日期 |
2005.11.17 |
申请号 |
US20050114029 |
申请日期 |
2005.04.26 |
申请人 |
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发明人 |
OHKURA HIDEAKI;SANO TAKESHI;KOBAYASHI HIROFUMI |
分类号 |
G02B5/20;H01L21/48;H01L21/56;H01L23/13;H01L23/31;H01L23/495;H01L23/498;H05K1/00;H05K3/12;H05K3/20;(IPC1-7):B41M1/00 |
主分类号 |
G02B5/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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