发明名称 Pattern form object and a manufacturing method thereof
摘要 A pattern form object and its manufacturing method are disclosed. The pattern form object includes a pattern constituted by an aggregate of grains, a supporting member for supporting the pattern, and a mixed layer formed at a boundary of the pattern and the supporting member. The mixed layer is constituted by a mixture of the grains and the supporting member. Dimensions of the grains in a region other than the mixed layer are greater than dimensions of the grains in the mixed layer.
申请公布号 US2005252398(A1) 申请公布日期 2005.11.17
申请号 US20050114029 申请日期 2005.04.26
申请人 发明人 OHKURA HIDEAKI;SANO TAKESHI;KOBAYASHI HIROFUMI
分类号 G02B5/20;H01L21/48;H01L21/56;H01L23/13;H01L23/31;H01L23/495;H01L23/498;H05K1/00;H05K3/12;H05K3/20;(IPC1-7):B41M1/00 主分类号 G02B5/20
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