发明名称 NEGATIVE PHOTORESIST COMPOSITION FOR THICK FILM, PHOTORESIST FILM AND METHOD FOR FORMING BUMP BY USING SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a negative photoresist composition for a thick film, which has high sensitivity and preferable plating durability and is suitable as a material for forming a bump, and to provide a photoresist film and a method for forming a bump by using the film. <P>SOLUTION: The negative photoresist composition for a thick film contains (A) a novolac resin, (B) a plasticizer, (C) a crosslinking agent and (D) an acid generating agent. The component (B) is a vinylmethylether polymer or a vinylethylether polymer. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2005309451(A) 申请公布日期 2005.11.04
申请号 JP20050134022 申请日期 2005.05.02
申请人 TOKYO OHKA KOGYO CO LTD 发明人 SAITO KOJI;MISUMI KOICHI;OKUI TOSHIKI;KOMANO HIROSHI
分类号 G03F7/004;G03F7/038;H01L21/027;H01L21/60 主分类号 G03F7/004
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