| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To obtain a thermionic cathode and its manufacturing method with a long life and low power consumption capable of stably performing thermionic emission from an n-type diamond in a low temperature action. <P>SOLUTION: The thermionic cathode is equipped with an n-type diamond layer as an electron emission substance on a surface of a substrate, and the n-type diamond layer includes a layer containing a transition metal element on its surface layer part. Further, a process forming the n-type diamond layer on the surface of the substrate and a process containing a transition metal element from a surface layer side of the n-type diamond layer to the surface layer part of the n-type diamond layer are included. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
