| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To stabilize precision of a mixed ratio and amount of supply and to supply polishing solution without deterioration and with stable quality to a polishing device. <P>SOLUTION: The device is provided with a plurality of undiluted solution tanks 1, 3 and 5 storing a plurality of undiluted solutions 2, 4 and 6 different in components, an aggregation part 33 merging a plurality of undiluted solutions, tubular objects 27, 29 and 31 whose one end is opened to the respective undiluted solutions in a plurality of the undiluted solution tanks and the other end to the aggregation part 33 and which have prescribed lengths, a suction means 37 sucking a plurality of the undiluted solutions through the tubular objects and the aggregation part, and a storing tank 40 storing the polishing solution whose mixed ratio of a plurality of the undiluted solutions is set by varying the number of the tubular objects connected to the aggregation part and the undiluted solutions in a plurality of the undiluted solution tanks. The polishing solution is supplied to the polishing devices 50 and 55 from discharge ports 49 and 54 through the discharge line 45 connected to the storing tank. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
