A method for manufacturing the micro inertia sensor,申请号KR20030088526-传众专利搜索

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发明名称	A method for manufacturing the micro inertia sensor
摘要
申请公布号	KR100519818(B1)	申请公布日期	2005.10.10
申请号	KR20030088526	申请日期	2003.12.08
申请人		发明人
分类号	B81C1/00;(IPC1-7):B81C1/00	主分类号	B81C1/00
代理机构		代理人
主权项
地址

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