发明名称 |
Carrier head with a non-stick membrane |
摘要 |
A carrier head for chemical mechanical polishing of a substrate includes a base and a flexible membrane extending beneath the base to define a chamber. The flexible membrane has a core of a first material and an outer layer of a second material having a lower adhesion to the substrate than the first material. An exposed surface of the outer layer provides a mounting surface for the substrate.
|
申请公布号 |
US2005221734(A1) |
申请公布日期 |
2005.10.06 |
申请号 |
US20050144245 |
申请日期 |
2005.06.02 |
申请人 |
ZUNIGA STEVEN M;CHEN HUNG C |
发明人 |
ZUNIGA STEVEN M.;CHEN HUNG C. |
分类号 |
B24B1/00;B24B37/04;B24B41/06;(IPC1-7):B24B1/00 |
主分类号 |
B24B1/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|