| 摘要 |
<p>Members used in CVD apparatuses, plasma processing apparatuses and the like are worn out by reaction with a corrosive gas or etching with plasma and thus cause problems such as contamination of products by particles formed therefor and lowering of productivity yield. Glasses resistant to corrosive gases and plasma are weak in the heat-resistant strength and thus have limited applications. A member composed of a highly heat-resistant base covered with a glass spray coating of a corrosion-resistant glass containing at least one element selected from the group consisting of elements of group 2a, group 3a and group 4a, especially one with a spray coating of an alminosilicate or zirconia silicate is high in corrosion resistance to corrosive gases and plasma and in heat-resistant strength, and thus forms few particles.</p> |
