摘要 |
<p><P>PROBLEM TO BE SOLVED: To make a polarization inversion part long when a periodic polarization inversion structure is formed in a substrate. <P>SOLUTION: The periodic polarization inversion structure is formed in the substrate by applying a voltage between a 1st electrode 4OA provided on one surface of a ferroelectric single-crystal substrate and a 2nd electrode provided on the substrate opposite the electrode 40A. The 1st electrode 40A is equipped with an electrode piece array body 2 comprising a plurality of electrode pieces which are cyclically arrayed, a feed electrode 1 for feeding the electrode pieces, and a probing pad 7 connected to the feed electrode 1. A floating conductive film 13 is provided facing the electrode piece array body 2 on one surface, the floating conductive film 13 being≥100μm width. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |