发明名称 Method for attaching semiconductor components to a substrate using component attach system having radiation exposure assembly
摘要 A method and a system for attaching semiconductor components to a substrate are provided. In the illustrative embodiment the substrate is a leadframe, and the components are semiconductor dice or packages contained on a component substrate such as a wafer. The method includes the steps of holding and dicing the component substrate using a radiation sensitive tape. The method also includes the steps of providing a component attach system having a radiation curing system, and then performing local curing of the dicing tape during a component attach step using the component attach system. The system includes the component attach system which includes a stepper mechanism for stepping the component substrate, and a component attach mechanism having an ejector pin for pushing the components one at a time from the tape and a pick and place mechanism for placing the components on the substrate. The component attach mechanism also includes a housing having a contact surface for physically engaging the dicing tape, and an opening having an outline matching that of a singulated component.
申请公布号 US6943094(B2) 申请公布日期 2005.09.13
申请号 US20030456274 申请日期 2003.06.06
申请人 MICRON TECHNOLOGY, INC. 发明人 KOOPMANS MICHEL
分类号 H01L21/00;(IPC1-7):H01L21/46;H01L21/78;H01L21/301 主分类号 H01L21/00
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