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发明名称
APPARATUS OF DOUBLE TUBES FURNACE
摘要
申请公布号
KR20050065738(A)
申请公布日期
2005.06.30
申请号
KR20030095848
申请日期
2003.12.23
申请人
DONGBUANAM SEMICONDUCTOR INC.
发明人
KIM, TAE HWAN;CHO, YOUNG HOO
分类号
H01L21/20;(IPC1-7):H01L21/20
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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