| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an acceleration sensor of high reliability capable of preventing effectively an offset of detection signals, and capable of detecting an acceleration with sufficient sensitivity. <P>SOLUTION: A substrate 10 with a piezoelectric element 12 joined to a diaphragm 11, and with a weight 20 fixed onto an under face of the center is fixed to a housing 30. A rigid stopper 40 is brought into close contact with an upper face of the substrate 10, and a deformation toward an upper side of the substrate 10 is regulated by the stopper 40, to prevent a charge generated in a detecting electrode 12a of the piezoelectric element 12 from being set off. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
