| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that annealing fails to realize a desired quality because temperature distribution in the annealing chamber is not consistent and therefore an appropriate in-plane temperature distribution is not achieved in case the size of the workpiece which ordinarily is approximately 620 mm is so much larger as to be approximately 1,000-1,800 mm. SOLUTION: The annealing apparatus has a side heating means, a bottom heating means, and a vapor generating/heating means. The side heating means is divided into a plurality of divided heating means arranged in the longitudinal direction of the reaction vessel with certain distances between them. Each of the divided heating means is further divided into a plurality of re-divided heating means each heating the periphery of the reaction vessel only by a specified angle. The bottom heating means comprises a plurality of divided heating means concentrically arranged under the reaction vessel bottom with certain distances between them. The temperatures of the side section heating means, the bottom section heating means, and the vapor generating/heating means are controlled independently. COPYRIGHT: (C)2005,JPO&NCIPI
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