发明名称 |
Mask for inspecting an exposure apparatus, a method of inspecting an exposure apparatus, and an exposure apparatus |
摘要 |
To inspect the polarization state of light flux for exposure of an exposure apparatus, a mask for inspection is held at the photomask position. This mask for inspection comprises a polarizing element which is disposed in a light path of light flux forming an image of a light source and which can selectively transmit light flux with a plurality of polarization directions. |
申请公布号 |
US2005099613(A1) |
申请公布日期 |
2005.05.12 |
申请号 |
US20040958594 |
申请日期 |
2004.10.06 |
申请人 |
FUKUHARA KAZUYA |
发明人 |
FUKUHARA KAZUYA |
分类号 |
C01B33/18;C01F7/02;C08K7/18;C08L101/00;C09K5/08;G03B27/42;G03F1/00;G03F1/08;G03F1/14;G03F1/68;G03F7/20;G03F9/00;H01L21/027;(IPC1-7):G03B27/42 |
主分类号 |
C01B33/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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