X-RAY INSPECTION APPARATUS CAPABLE OF ACCURATELY ACQUIRING INFORMATION ON DESIRED CROSS SECTION BY INCLUDING SWINGING UNIT FOR HOLDING OBJECT TO BE INSPECTED ON X-RAY PATH AND PERFORMING SWINGING OPERATION AT ARBITRARY ANGLE AND DIRECTION, AND X-RAY INSPECTION METHOD

摘要

PURPOSE: An X-ray inspection apparatus and an X-ray inspection method are provided to accurately acquire information on a desired cross section even in case where an interval between components of an object to be inspected is narrow and components are mounted in a high density. CONSTITUTION: An X-ray inspection apparatus comprises an X-ray irradiation unit(3), an X-ray detection unit(1), a swinging unit(2), and a control unit(6). The X-ray irradiation unit generates an X-ray and irradiates the X-ray to an object to be inspected. The X-ray detection unit detects the X-ray irradiated from the X-ray irradiation unit and passed through the object. The swinging unit holds the object to be inspected on an X-ray path leading from the X-ray irradiation unit to the X-ray detection unit, and drives the object to be inspected at an arbitrary angle in an arbitrary direction with respect to the X-ray irradiation axis of the X-ray path. The control device controls operation of the swinging unit and the X-ray irradiation unit, takes an input of X-ray image data from the X-ray detection unit, and displays the X-ray image data.