ELEMENT MANUFACTURING METHOD AND ELEMENT MANUFACTURING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide an element manufacturing method of efficiently forming an element equipped with a space wiring, and an element manufacturing apparatus. SOLUTION: The element manufacturing method of giving liquid 54 containing a metal to an element forming substrate comprises the steps of: forming a hole 53 in the element forming substrate; and filling the hole 53 with the liquid 54 containing the metal by an ink jet system. COPYRIGHT: (C)2005,JPO&NCIPI