| 摘要 |
PROBLEM TO BE SOLVED: To improve working quality and stabilize the working quality by equalizing pressure contact force of a polishing body to a workpiece, and to prevent occurrence or the like of a crack by preventing rapid movement of the workpiece caused by an external impact or the like acting on the workpiece. SOLUTION: This polishing device 1 of a hole inner peripheral surface of a sheet glass or the like polishes the inner peripheral surface of a hole H formed in the workpiece W such as the sheet glass and performs chamfering. The polishing device comprises: a loading table 15 for loading the workpiece W; a fixing clamp 17 for fixing the workpiece W onto the loading table 15; a rotary motor 53 for rotating the loading table 15; a sliding mechanism for making the loading table 15 slide horizontally; a polishing body 21 that directly abuts on the inner peripheral surface of the hole H and performs polishing, a driving motor 33 as a driving means of a polishing object 21; and a pressurizing means for keeping constant the pressure contact force of the polishing body 21 to the inner peripheral surface of the hole H. COPYRIGHT: (C)2005,JPO&NCIPI
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