摘要 |
PROBLEM TO BE SOLVED: To provide a two-dimensional semiconductor detector which can be easily manufactured while keeping high in spatial resolution, and to provide a two-dimensional imaging apparatus using the same. SOLUTION: An n-type semiconductor film 7 is arranged so as to cover all the surface of a read-out board 3 where radiation and the like are incident, and a sensitive semiconductor film 6 and a common electrode 5 are successively laminated in this sequence on the surface of the n-type semiconductor film 7 for the formation of the two-dimensional semiconductor detector. Therefore, a detection board and a read-out board are not required to be separately manufactured, and moreover the boards are not required to be precisely aligned with each other. COPYRIGHT: (C)2005,JPO&NCIPI
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