发明名称 TWO-DIMENSIONAL SEMICONDUCTOR DETECTOR AND TWO-DIMENSIONAL IMAGING APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a two-dimensional semiconductor detector which can be easily manufactured while keeping high in spatial resolution, and to provide a two-dimensional imaging apparatus using the same. SOLUTION: An n-type semiconductor film 7 is arranged so as to cover all the surface of a read-out board 3 where radiation and the like are incident, and a sensitive semiconductor film 6 and a common electrode 5 are successively laminated in this sequence on the surface of the n-type semiconductor film 7 for the formation of the two-dimensional semiconductor detector. Therefore, a detection board and a read-out board are not required to be separately manufactured, and moreover the boards are not required to be precisely aligned with each other. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005019543(A) 申请公布日期 2005.01.20
申请号 JP20030179917 申请日期 2003.06.24
申请人 SHIMADZU CORP 发明人 TOKUDA SATOSHI;KISHIHARA HIROYUKI
分类号 G01T1/00;G01T1/24;H01L27/00;H01L27/12;H01L27/14;H01L27/146;H01L29/786;H01L31/00;H01L31/09;H01L31/115;(IPC1-7):H01L27/146 主分类号 G01T1/00
代理机构 代理人
主权项
地址