发明名称 |
Wafer protective cassette |
摘要 |
A substrate cassette having a conventional form, an open container having an upper entrance and a narrow lower opening formed by two side panels and two end panels. A preferred embodiment includes a train of substrate alignment channels on the inner surfaces of the two side panels, each channel is U shaped and having planar surface with a left surface, a right surface, and a bottom surface. An arcuate curbing member disposed on a left surface in each of the substrate alignment channels. The arcuate curbing member includes a top end with a thinner sloped profile facing the upper open entrance of the cassette allowing a substrate to slide through and under a stepped lower end.
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申请公布号 |
US2005006325(A1) |
申请公布日期 |
2005.01.13 |
申请号 |
US20030615743 |
申请日期 |
2003.07.09 |
申请人 |
CHARTERED SEMICONDUCTOR MANUFACTURING LTD. |
发明人 |
HUA TONG WEI;HONG CHIA BAK;JIAN ZHANG;YONG TAN LIANG |
分类号 |
H01L21/673;(IPC1-7):A47G19/08 |
主分类号 |
H01L21/673 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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