发明名称 COATING LIQUID APPLYING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a coating liquid applying method by which a uniform coating can be performed even on a non-rectangular work by restraining the production of poor film thickness to be caused by a gap formed between the work and the recess-worked part of a stage. <P>SOLUTION: A liquid coating film is formed on the work by using an extrusion die having a slit formed by at least two blades, working the stage into the shape of the work to have the recessed part, dropping the work in the cut part of the stage and keeping them almost on a same surface, extruding a coating liquid onto the stage from the slit and moving the die or the stage in parallel at the same time. The coating is performed by using the stage the surface of which is treated so that the contact angle of the inner wall of the part where the work is dropped with the coating liquid is made to be &ge;50&deg;. <P>COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005000717(A) 申请公布日期 2005.01.06
申请号 JP20030163559 申请日期 2003.06.09
申请人 CANON INC 发明人 KOBAYASHI FUMIKAZU
分类号 G03F7/16;B05D1/26;H01L21/027 主分类号 G03F7/16
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