| 发明名称 |
PARTIAL PRESSURE CONTROL SYSTEM, FLOW RATE CONTROL SYSTEM AND SHOWER PLATE USED IN PARTIAL PRESSURE CONTROL SYSTEM |
| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a partial pressure control system in which the useless consumption of working gas can be reduced and whose responsiveness to the change of a preset value can be improved. <P>SOLUTION: The partial pressure control system 45 is provided with two valves 8 which are arranged on working gas supplying piping in parallel and each of which is used for controlling the flow rate of the working gas in a variable manner, a pressure sensor 3 connected in series with each of the valves 8 for detecting the pressure of the working gas and a controller 25 for controlling the output pressure P1 or P2 of any of the valves 8 relatively by controlling the operation of each of the valves 8 proportionally on the basis of the result detected by the pressure sensor 3. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
| 申请公布号 |
JP2005000723(A) |
申请公布日期 |
2005.01.06 |
| 申请号 |
JP20030163696 |
申请日期 |
2003.06.09 |
| 申请人 |
TOKYO ELECTRON LTD |
发明人 |
NAGAOKA HIDEKI;KOIZUMI HIROSHI;OYABU ATSUSHI;SHIMAZU TSUTOMU;ENDO HIROKI;ITO YOSHITAKA;HAYASHI DAISUKE |
| 分类号 |
B01J4/00;H01L21/00;(IPC1-7):B01J4/00 |
主分类号 |
B01J4/00 |
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