| 发明名称 |
Method of fabrication of a heteroepitaxial microstructure |
| 摘要 |
<p>Fabricating of microstructure comprises creating surface of carrier structure by splitting the carrier structure prior to forming the epitaxial layer. The epitaxial structure is formed on a surface of the carrier structure.</p> |
| 申请公布号 |
EP1482549(A1) |
申请公布日期 |
2004.12.01 |
| 申请号 |
EP20030291284 |
申请日期 |
2003.05.27 |
| 申请人 |
S.O.I. TEC SILICON ON INSULATOR TECHNOLOGIES S.A. |
发明人 |
FAURE, BRUCE;LETERTRE, FABRICE |
| 分类号 |
C30B25/18;C30B29/38;C30B29/52;C30B33/00;H01L21/20;H01L21/762;H01L21/8234;(IPC1-7):H01L21/762 |
主分类号 |
C30B25/18 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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