| 摘要 |
PROBLEM TO BE SOLVED: To provide a prove unit and its manufacturing method which prevents a probe from dropping from electrodes of a sample under test. SOLUTION: The probe unit comprises a base 20 and a comb-like probe sheet having a plurality of probes 10 connected at their base ends in one body by the base 20. The probe 10 is expanded at the top end 12 and this expanding prevents the probe 10 from dropping from the top face of an electrode 50 of a sample 5 under test. The top ends of the plurality of probes 10 are made uneven along the arranging line of the probes 10 to allow the top end 12 of the probe 10 to be expanded, without increasing the pitch of the center axial line of each probe 10. This allows the minimum gap between the adjacent probes 10 to be reduced in their arranging direction. Thus the availability is raised for the sample 5 having a plurality of thin and long electrodes 50 like parallel lines, without reducing the pitch of each probe 10. COPYRIGHT: (C)2005,JPO&NCIPI
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