Empty tank replacement method for resist tank used in semiconductor photolithography system has capacitive level and bubble sensors and machine readable code on tank

摘要

A capacitive level sensor (16) and bubble sensor (15) determine whether the resist tank (2) is empty or sufficiently full. The photolithography system (1) is paused on detection of an 'empty' signal or when a 'full' signal is not detected to allow insertion of a replacement tank. A machine readable code on the tank is scanned prior to insertion and compared with a correct code stored in a database (25). The system will only restart if the codes match. An independent claim is included for an apparatus for carrying out the method.