发明名称 Piezoelectric component and method for producing it
摘要 The invention describes a method for producing a piezoelectric component comprising at least two stacked crystal filters. By means of the deposition of the layer stack above the bottom electrode and the subsequent patterning of the upper electrically conductive layer and, if appropriate, second piezoelectric layer, it is possible, in a simple manner, with a minimum of process steps, to produce a piezoelectric component comprising two stacked crystal filters which are directly connected to one another via their bottom and central electrodes. The piezoelectric component according to the invention furthermore has the advantage that applications in which a high stop band attenuation is important can be realized with a relatively small number of filter stages. In this case, through the use of at least two stacked crystal filters, it is possible to achieve an excellent out-of-band rejection also for "single-ended signals".
申请公布号 US2004201305(A1) 申请公布日期 2004.10.14
申请号 US20040808949 申请日期 2004.03.25
申请人 AIGNER ROBERT;MARKSTEINER STEPHAN;NESSLER WINFRIED 发明人 AIGNER ROBERT;MARKSTEINER STEPHAN;NESSLER WINFRIED
分类号 H03H3/02;H03H3/04;H03H9/00;H03H9/58;H03H9/60;(IPC1-7):H01L41/08 主分类号 H03H3/02
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