| 摘要 |
<P>PROBLEM TO BE SOLVED: To realize a semiconductor relay with a high off withstand voltage, a low on resistance, and a low off capacity in the semiconductor relay with the high off withstand voltage, the low on resistance, and the low off capacity regarding the semiconductor relay used for an IC (integrated circuit) tester. <P>SOLUTION: The semiconductor relay, which has a first photo MOS (metal oxide semiconductor) relay 10 with the high off withstand voltage, the low on resistance, and the high off capacity; and a second photo MOS relay 20 with low off withstand voltage, the low on resistance, and the low off capacity, is characterised in that the first photo MOS relay 10 and the second photo MOS relay 20 are connected in series, the open ends of the first/second photo MOS relays are made as input ends or output ends, and the first/second photo MOS relays are turned on/off. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
