| 摘要 |
PROBLEM TO BE SOLVED: To move or carry a table efficiently by a simple device constitution when a stage body and the table for supporting a wafer on the stage body are arranged separably. SOLUTION: A movable table TB1 for holding a wafer W1 is moved from another stage body to a wafer stage ST1 through a station 61A. The station 61A is held displaceably up and down on a slider 65A by a rod 61A, a stopper 73 is secured to the slider 65A, and a leg 74 capable of switching a height among a plurality of stages, e.g. a gas cylinder, is secured at three points to the bottom face of the station 61A. The station 61A is mounted on the stopper 73 by shortening the leg 74 when the movable table TB1 is carried, and the station 61A is made flush with the slide surface of the wafer stage ST1 by stretching the leg 74 when the movable table TB1 is moved to the wafer stage ST1. COPYRIGHT: (C)2004,JPO&NCIPI |
