MAGNETIC TUNNEL JUNCTION DEVICE AND METHOD FOR MANUFACTURING THE SAME, IN WHICH A BOTTOM ELECTRODE IS IMPROVED

摘要

PURPOSE: A magnetic tunnel junction device and a method for manufacturing the same are provided to remove the requirement for the seed layer formed between the lower electrode and the pinning layer. CONSTITUTION: A magnetic tunnel junction device includes a bottom electrode(69), a pinning layer pattern(71), a pinned layer pattern(73), a tunneling layer pattern(75), a free layer pattern(77), a capping layer pattern(79) and a top electrode(81). The magnetic tunnel junction device is characterized in that the bottom electrode(69) has a root mean square(RMS) surface roughness is less than 5Å.