| 摘要 |
PROBLEM TO BE SOLVED: To provide a small-sized temperature sensor of high resistance value which has superior response and low consumption power. SOLUTION: The temperature sensor is provided with a sheet-like substrate 110 composed of zirconia which has a linear expansion coefficient approximate to Ni, and a temperature detecting element 100 which is formed on a plane of the substrate 110 and constituted of a circuit pattern 120 of an Ni foil (or Pt foil). Since a zirconia substrate of little brittleness is acted among ceramicses as the substrate of the element 100, thickness can be reduced as compared with other ceramic substrates. As a result, the heat capacity of a temperature sensor itself becomes small, so that the small-sized temperature sensor of high resistance value which has superior response and low consumption power can be obtained. COPYRIGHT: (C)2004,JPO&NCIPI
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