| 摘要 |
PROBLEM TO BE SOLVED: To provide a multipole lens having multi-functions used for a charged particle beam. SOLUTION: A rotation-symmetry lens as shown in (a) is omitted, and instead, a voltage +V1 necessary for functions as the rotation-symmetry lens is superimposed on electrodes 2a, 2b, 2c, 2d of a quadrupole lens in addition to a voltage for making them function as a quadrupole lens as shown in (b). In other words, (V1+V2) is impressed on the electrodes 2a, 2c, and (V1-V2) is impressed on the electrodes 2b, 2d. With this, the rotation-symmetry lens 1 shown in (a) is omitted, and the quadrupole lens 2 can be made to function both as a rotation-symmetry lens and a quadrupole lens. COPYRIGHT: (C)2004,JPO&NCIPI
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