METHOD AND APPARATUS FOR DETERMINING LAYER THICKNESS AND COMPOSITION USING ELLIPSOMETRIC EVALUATION

摘要

One embodiment of the present invention provides a system that determines the composition of a layer within an integrated device. The system operates by first receiving the integrated device (202). Next, the system measures properties of the layer using electro-magnetic radiation (208). The properties of the layer measured are used to determine an index of refraction for the layer (212). The system then solves for the composition of the layer using the index of refraction (212).