发明名称 Apparatus for etching a glass substrate
摘要 In an apparatus for etching a glass substrate according to the present invention, impurities that are attached to the surface of a glass substrate, which are formed by assembling a color filter substrate and a TFT substrate provided in the etching bath filled with etchant, are removed by using ultrasonic oscillation generated from an ultrasonic oscillator, by which a glass substrate having uniform thickness and surface is obtained.
申请公布号 US2004079483(A1) 申请公布日期 2004.04.29
申请号 US20030689622 申请日期 2003.10.22
申请人 DOH YONG IL 发明人 DOH YONG IL
分类号 G02F1/13;B08B3/12;C03C15/00;(IPC1-7):C23F1/00 主分类号 G02F1/13
代理机构 代理人
主权项
地址