| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To appropriately perform the phase trimming of an optical waveguide part without deteriorating the characteristics of a PDL or the like in an ion exchange type optical waveguide device constituted by forming an optical waveguide by an ion exchange method in a glass substrate. <P>SOLUTION: In the ion exchange type optical waveguide device where the optical waveguides 20 to 24 by the ion exchange method are formed in a glass substrate 10 and an optical device having a specified function is formed by the optical waveguides 20 to 24, a specified area 50 of the optical waveguides 20 to 24 is selectively heated to perform the trimming of the characteristic of the optical device, and the heating for trimming is performed in a non-restraint state where the stress of the surface of the substrate 10 is released. <P>COPYRIGHT: (C)2004,JPO</p> |
