| 摘要 |
PROBLEM TO BE SOLVED: To provide a sound pressure sensor capable of highly precisely detecting ultrasonic vibration. SOLUTION: This sound pressure sensor for detecting the sound pressure of ultrasonic vibration is provided with a waveguide 2 whose top end part is formed on an incident face 4 of ultrasonic vibration, a piezoelectric element 6 arranged at the rear edge of this waveguide for converting the sound pressure of ultrasonic vibration made incident from the incident face to the waveguide, and propagated to the rear edge into an electric signal, and an overcoat body 3 from which the incident face of the top end part of the waveguide is exposed wherein the outer peripheral face is liquid-tightly covered through an air layer 9. COPYRIGHT: (C)2004,JPO
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