| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a position measurement system which can perform the position measurement, utilizing light interference with simple configuration at low cost. <P>SOLUTION: The position measurement system includes a laser light source 1 for emitting a laser beam, an optical lens system 2 for generating an interference pattern by the laser beam passing through a different optical path, a detector 3 for detecting the interference pattern, and a processor 30 for obtaining the position of at least one of the light source and and the detector, on the basis of the detection signal from the detector. The optical lens system 2 may use a spherical lens, for example. In this case, the interference pattern is obtained, utilizing a spherical aberration. Further, a multi-focus lens may be used as the optical lens system 2. <P>COPYRIGHT: (C)2004,JPO</p> |
