发明名称 DRY FILM RESIST PEELING DEVICE AND SUBSTRATE CARRYING MECHANISM
摘要 <P>PROBLEM TO BE SOLVED: To provide a dry film resist peeling device for a plasma display panel substrate by which a peeled dry film resist does not twine around a carrying roller shaft. <P>SOLUTION: In the dry film resist peeling device in which two or more carrying roller shafts 2 are arranged and which peels the dry film resist 9 on a substrate to be carried 1 by a peeling solution 6 ejected from a spray nozzle 5, each carrying roller shaft 2 is connected with a pulley 4 located in its downward direction by a flat belt 3 and the substrate 1 is carried by the carrying roller shaft 2 via the flat belt 3. <P>COPYRIGHT: (C)2004,JPO
申请公布号 JP2004020820(A) 申请公布日期 2004.01.22
申请号 JP20020174376 申请日期 2002.06.14
申请人 NEC KAGOSHIMA LTD 发明人 TAKENOUCHI NOZOMI
分类号 G03F7/004;B65G49/06;G03F7/42;H01J9/02;H01J11/22;H01J11/34;H01J11/36;H01L21/677;H01L21/68 主分类号 G03F7/004
代理机构 代理人
主权项
地址