发明名称 SLUDGE REMOVING TRAP
摘要 PROBLEM TO BE SOLVED: To provide a sludge removing trap which can effectively capture a non-reactive raw material by improving a baffle plate in the trap, and moreover can restrict the clogging of an exhaust system to extend over a long period of a time in a maintenance cycle. SOLUTION: A plurality of baffle plates 7 blocking the flow of gas are arranged in parallel in a downstream in a housing 6 of a sludge removing trap 5 to form a plurality of chambers 51, and a gas inlet 8 is opened at one location on an outer marginal side in the respective baffle plates 7. The baffle plates 7 are sequentially arranged so that the location of the gas inlet 8 differs largely between neighboring baffle plates 7a, 7b, or 7b, 7c, to form an exhaust path 52 of a labyrinth structure in which the gas sequentially passes from the gas inlet 8 of the baffle plate 7 to the neighboring chamber 51. Further, a gas flow path 53 of a second labyrinth structure is formed of a panel wall 9 in each chamber 51. COPYRIGHT: (C)2004,JPO
申请公布号 JP2003347213(A) 申请公布日期 2003.12.05
申请号 JP20020153229 申请日期 2002.05.28
申请人 HITACHI CABLE LTD 发明人 FURUYA TAKASHI;NAGAI HISATAKA
分类号 H01L21/205;(IPC1-7):H01L21/205 主分类号 H01L21/205
代理机构 代理人
主权项
地址