IONIZED CLUSTER BEAM DEPOSITION APPARATUS FOR ORGANIC DEVICE AND METHOD FOR DEPOSITING ORGANIC MATERIAL USING THE SAME

摘要

PURPOSE: An ionized cluster beam deposition apparatus for organic device and a method for depositing organic material using the same are provided to deposit a flat and uniform organic layer on a broad substrate by improving a structure of the deposition apparatus. CONSTITUTION: An ionized cluster beam deposition apparatus for organic device includes a circular grid(8), an electron emission filament(9), an ion acceleration electrode(7), and a substrate(1). The circular grid(8) is used for surrounding a cluster penetration part. The electron emission filament(9) is used for surrounding the circular grid(8). The ion acceleration electrode(7) is formed at an upper portion of the circular grid(8). The ion acceleration electrode(7) is connected to the ground. The circular grid(8) is formed with a net-shaped metallic material. A shutter(4) is formed at an upper portion of the ion acceleration electrode(7).