PADLESS POLISHING DEVICE AND METHOD

摘要

PROBLEM TO BE SOLVED: To provide a device and a method requiring no inspection of the surface of a surface plate nor the replacement of the surface plate, and uniformly polishing the surface of a polishing object with superior reproducibility.

SOLUTION: A tape 20 is sent out on the surface of the surface plate 11 having a flat surface. Polishing liquid is supplied to the surface of the tape 20. The surface of the polishing object W held in a holder 18 is pressed to this surface, and a head 10 is rotated. The holder 18 for holding the polishing object W can be rotated. The tape 20 is properly sent out on the surface of the surface plate 11. Polishing slurry 30 dispersed with an elastic particle 31 and a polishing particle 31 in dispersing liquid or polishing slurry 40 dispersed with a composite particle 41 for fixing a plurality of polishing particles 43 on the surface of an elastic particle 42 is used as the polishing liquid. The surface of the tape 20 has recesses 21 and 22 for holding the elastic particle 31 or the composite particle 41. Each of the depths of the recesses 21 and 22 falls within a range of 1/5 time to 2 times of the average particle size of the elastic particles 31 and 42.

COPYRIGHT: (C)2004,JPO