发明名称 |
STRUCTURE AND METHOD TO PRESERVE STI DURING ETCHING |
摘要 |
Disclosed is a method of protecting a semiconductor shallow trench isolation (STI) oxide from etching, the method comprising lowering, if necessary, the upper suface of said STI oxide to a level below that of adjacent silicon active areas, depositing a nitride liner upon said STI oxide and adjacent silicon active areas in a manner effective in defining a depression above said STI oxide, filling said depression with a protective film, and removing said nitride layer from said adjacent active areas. |
申请公布号 |
WO02095819(A3) |
申请公布日期 |
2003.11.20 |
申请号 |
WO2002US16351 |
申请日期 |
2002.05.23 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
DOKUMACI, OMER, H.;DORIS, BRUCE, B. |
分类号 |
H01L21/76;H01L21/301;H01L21/311;H01L21/318;H01L21/762;H01L29/00 |
主分类号 |
H01L21/76 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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