| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical waveguide which is suppressed in wavelength shift due to temperature changes. SOLUTION: In a fully embedded optical waveguide having a quartz layer 12 as an under clad, a silicon core part 14 and an over clad 13 on a silicon substrate 11, the over clad 13 is made of fluorinated polyimide having negative temperature coefficient of the refractive index so as to compensate the temperature coefficient of the refractive index of the silicon core part 14. COPYRIGHT: (C)2004,JPO |
