Verfahren und Vorrichtung zur Laserbearbeitung

摘要

In order to form a fine pattern at high speed with respect to a material (18) such as quartz glass exhibiting a remarkable band gap, having a short wavelength at absorption edge of light, and having high bond energy between constituent atoms, laser beam being transparent as to a material to be worked is irradiated thereupon, at the same time, plasma is produced at a place close to an objective surface of the material to be worked, and ablation is generated on the objective surface (A) of the material to be worked by means of interactions between the plasma and laser beam irradiated upon the material to be worked, thereby to work the material.