发明名称 PROBE CARD AND METHOD OF MANUFACTURING THE SAME
摘要 A probe card and a manufacturing method thereof are provided to enhance reliability and accuracy in an inspection process by preventing a contact error of a probe. A test head(150) is formed to apply test current to a test target. A plurality of probes(110) include tip parts to be electrically connected to the test target. A guide block(100) includes a guide slit(101) and a circuit pattern(120). The probe is stored in the guide slit. The circuit pattern is formed to connect electrically the test head with the probe. A conductive bump(130) is formed on the guide block in order to connect electrically the circuit pattern with the probes.
申请公布号 KR20080067026(A) 申请公布日期 2008.07.18
申请号 KR20070004048 申请日期 2007.01.15
申请人 MICO TN LTD. 发明人 JEON, TAE WOON;KIM, JUNG SIK
分类号 H01L21/66 主分类号 H01L21/66
代理机构 代理人
主权项
地址