发明名称 |
PROBE CARD AND METHOD OF MANUFACTURING THE SAME |
摘要 |
A probe card and a manufacturing method thereof are provided to enhance reliability and accuracy in an inspection process by preventing a contact error of a probe. A test head(150) is formed to apply test current to a test target. A plurality of probes(110) include tip parts to be electrically connected to the test target. A guide block(100) includes a guide slit(101) and a circuit pattern(120). The probe is stored in the guide slit. The circuit pattern is formed to connect electrically the test head with the probe. A conductive bump(130) is formed on the guide block in order to connect electrically the circuit pattern with the probes.
|
申请公布号 |
KR20080067026(A) |
申请公布日期 |
2008.07.18 |
申请号 |
KR20070004048 |
申请日期 |
2007.01.15 |
申请人 |
MICO TN LTD. |
发明人 |
JEON, TAE WOON;KIM, JUNG SIK |
分类号 |
H01L21/66 |
主分类号 |
H01L21/66 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|