| 摘要 |
PROBLEM TO BE SOLVED: To further heighten the accuracy of measuring a physical quantity in a thermal sensor for measuring a temperature that changes in accordance with a change in physical quantity and thereby measuring the physical quantity.SOLUTION: A thermal sensor 100 measures a physical quantity by a temperature difference between a measurement area where the temperature changes in accordance with a change in physical quantity and a reference area. The thermal sensor has a thermopile configured with a first thermoelectric element 131 formed with a first conductive type semiconductor and a second thermoelectric element 151 formed with a material different from the first thermoelectric element 131, and a diode in which a first electrode 132 formed with the same material as that of the first thermoelectric element 131 and a second electrode 152 formed with a second conductive type semiconductor are joined together. The temperature difference for measuring a physical quantity is measured by a voltage signal outputted by the thermopile due to that the first and second contacts of the thermopile are disposed in the measurement area and the reference area.SELECTED DRAWING: Figure 3 |
