Method of production data detection in production plant especially semiconductor chip production plant, involves determining and storing part production data from part production plants

摘要

A method for detecting production data in a production plant, in which part production data is determined and stored by the part production plants, and via at least one grouping table for allocating the part production data to groups of the grouping table then the part production data are displayed. In the grouping table, machines of the part production plants are grouped to at least one machine group or machine units/components of the part production plants are grouped to at least one machine component group or manufacturing formulations are grouped to at least one formulation group or manufacturing parameters are grouped to at least one parameter group. An Independent claim is given for a system for detecting production data in a production plant.