Method for producing aspherical structure, and aspherical lens array molding tool and aspherical lens array produced by the same method

摘要

A method for producing an aspherical structure according to the invention includes the steps of: forming a layer on a surface of a substrate so that the layer exhibits an etching rate distribution in a direction perpendicular to the surface of the substrate; forming a mask having a predetermined opening shape on the surface of the layer; and etching the layer to thereby form at least one aspherical concave portion. When each concave portion is used as a molding tool so that a resin with which the concave portion is filled is solidified and removed from the concave portion, an aspherical lens array can be formed accurately.