| 摘要 |
PURPOSE: A substrate holding unit, an exposure apparatus, and a device manufacturing method are provided to be capable of supporting a substrate while securing a high planarization, and simultaneously reducing the weight of the substrate holding unit. CONSTITUTION: A substrate holding unit includes a holder body part(70), wherein the holder body part is formed into a three-floor honeycombed structure. At this time, the holder body part is provided with the first part(61) made of the first ceramic plate having a thickness of 't1', the second part(62) made of the second ceramic plate having the same thickness of 't1', and a core part(63) formed into a honeycombed structure, located between the first and second part. At the time, the core part has a thickness of 12-15 mm.
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