| 摘要 |
PROBLEM TO BE SOLVED: To provide a small, robust and inexpensive three-dimensional position measuring device. SOLUTION: The position measuring device measures a position of an object 1 to be measured supported by holding mechanisms 2 and 3 providing free movement in any of X, Y and Z axes. It is provided with a light source 4 irradiating light on the object 1 to be measured, a density pattern mask 11 interposed between the light source 4 and the object 1 to be measured, an image input device 5 for inputting reflected light of the object 1 to be measured, and Z direction displacement computing unit 6 and XY direction displacement computing unit 7 connected with the image input device. It has a plurality of density pattern masks where concentration reversed parts are not superimposed to be used as the density pattern mask 11, and a different density pattern mask is used by changing it every shot by the image input device 5. COPYRIGHT: (C)2003,JPO
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